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CAS NO.6074-84-6
TANTALUM ETHOXIDE Basic information |
Product Name: | TANTALUM ETHOXIDE |
Synonyms: | ethanol,tantalum(5+)salt;TANTAL(V)-ETHOXID;TANTALUM PENTAETHOXIDE;TANTALUM(V) ETHOXIDE;TANTALUM ETHOXIDE;TANTALUM ETHYLATE;tantalum(5+) ethanolate;Tantalum(V) ethoxide, 99.98% metals basis |
CAS: | 6074-84-6 |
MF: | C10H25O5Ta |
MW: | 406.25 |
EINECS: | 228-010-2 |
Product Categories: | Catalysis and Inorganic Chemistry;Chemical Synthesis;Solution Deposition Precursors;Tantalum;TantalumMicro/Nanoelectronics;metal alkoxide;73: Tantalum;CVD and ALD Precursors by Metal;CVD and ALD Precursors Packaged for Deposition Systems;Micro &;Nanoelectronics;New Products for Materials Research and Engineering;Vapor Deposition Precursors;Materials Science;Micro/NanoElectronics |
Mol File: | 6074-84-6.mol |
TANTALUM ETHOXIDE Chemical Properties |
mp | 21 °C(lit.) |
bp | 155 °C0.01 mm Hg(lit.) |
density | 1.566 g/mL at 25 °C(lit.) |
refractive index |
n |
Fp | 87 °F |
storage temp. | 2-8°C |
Sensitive | Moisture Sensitive/Air Sensitive |
BRN | 3678999 |
CAS DataBase Reference | 6074-84-6(CAS DataBase Reference) |
Safety Information |
Hazard Codes | C,F |
Risk Statements | 10-34 |
Safety Statements | 16-26-36/37/39-45 |
RIDADR | UN 2920 8/PG 2 |
WGK Germany | 3 |
F | 3-8-10-21 |
TSCA | No |
HazardClass | 3 |
PackingGroup | III |
MSDS Information |
Provider | Language |
---|---|
SigmaAldrich | English |
ACROS | English |
ALFA | English |
TANTALUM ETHOXIDE Usage And Synthesis |
Chemical Properties | clear colorless to almost colorless liquid or |
Usage | Tantalum(V) ethoxide precursor is used to deposit ultra thin films of Tantalum oxide and other tantalum containing films by atomic layer deposition and chemical vapor deposition methods |